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利用激光技术对表界面性能进行检测与调控,可极大提升薄膜界面结合性能,保证薄膜的质量.阐述了国内和国际上对激光技术在表界面性能检测与调控中应用的最新研究动态,重点论述了激光层裂技术、激光划痕技术、激光调控技术以及这些技术在表界面性能应用中的优缺点及遇到的主要问题.在此基础上指出进一步扩大激光技术在表界面性能检测和调控中的应用将是薄膜制作和发展的一个重大趋势,必将成为国内和国际研究的热点问题.
Abstract：With the help of detection and control of the film-substrate interface properties by laser technology, it could greatly enhance the combined performance of films and guarantee the quality of films. In this paper, the new trends of laser process technologies used for detection and control of the film-substrate interface properties were stated, especially, laser spallation technology, laser scratch technology, control the surface residual stress by laser technology. Based on above mentioned, the research on laser technology in detection and control of the film-substrate interface properties was not enough sufficient. No effective means have been proposed to overcome these encounter problems, but it will be a new trend in the making and development of film in the furture research, and still remains to be a hot issue in China and abroad.
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基本信息:
DOI：
中图分类号:TN249
引用信息:
[1]曹宇鹏.激光技术在表界面性能检测与调控中的应用[J],2014,13(02):26-31.
基金信息:
国家自然科学基金项目(51175237);; 江苏省普通高校研究生科研创新计划项目(CXLX13_642);; 江苏省光子制造科学与技术重点实验室开放基金项目(GZ201108)